Nanostructuration by sol-gel embossing
Un article de Surface du verre et interfaces.
Alban Letailleur (PhD 2009-2012) - Jérémie Teisseire - Etienne Barthel - Elin Sondergard
Silica nanostructures generated by low temperature low pressure sol-gel embossing.
Patterning of surfaces at the sub-micrometer scale is a key factor for the emergence of a wide variety of applications from physics to biology. In photonics, nanostructures can provide new or enhance existing properties: e.g. antireflection coating or polarizers can be obtained.
Nano Imprint Lithography (NIL) has emerged as a promising technique to replicate nanostructures for surface functionalization. It allows the pattern transfer from a master mold to a thin film. In the laboratory, we have developed a one-step, fast and potential low cost process to make silica-like nanostructures by combining sol-gel chemistry and thermal nanoimprint. This technique allows for the formation of pattern with periods ranking from 100 nm to 20 µm with aspect ratio greater than 4. After a suitable thermal annealing, pure silica structured layer are obtained.
Progressive shift of the Tg during thermal treatment.
Our interests focus on the relation between rheological properties, material chemistry and ability to be embossed. We further develop the synthesis of highly functional structured surface such as porous layer or luminescent materials
Collaborations
- François Ribot and Cédric Boissière, LCMCP, Paris, for the material properties and synthesis.
- Gilles Lerondel, LNIO, Troyes for the optical chracterization of the obtained surfaces
- NaPaNILA project devoted to the application of nanoimprint lithography to the elaboration of large scale optical devices.
Recent Publications
- C. Peroz, C. Heitz, E. Barthel, E. Sondergard and V. Goletto, Glass nano-structures fabricated by soft thermal nanoimprint, Journal of Vacuum Science & Technology B 25 (2007) L27-L30
- Saison T, Peroz C, Chauveau V, Berthier S, Sondergard E, Arribart H Replication of butterfly wing and natural lotus leaf structures by nanoimprint on silica sol-gel films, Bioinspiration and Biomimetics 3(2008), 4, 46004.
- Christophe Peroz, Vanessa Chauveau, Etienne Barthel and Elin Sondergard, NanoImprint on Silica Sol-gels: a simple route to sequential patterning, Advanced Materials, 21(2009), 5, 555.